Lund Nano Lab - Nanotechnology Hub in Southern Sweden
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1 Lund Nano Lab - Nanotechnology Hub in Southern Sweden Maria Huffman Director NanoLund and Division of Solid State Physics Lund University Box 118, S-22100, Lund, Sweden
2 Outline of the presentation Ø Introduction Ø Lund Nano Lab as part of Myfab infrastructure and NanoLund Ø Mission and aims of Lund Nano Lab Ø Lund Nano Lab resources Ø Examples of research projects Ø Summary and link to LNL
3 Cleanroom facilities in Scandinavia Ø Myfab cleanroom consortium, 4 labs (Sweden) Ø NorFab cleanroom consortium, 4 labs (Norway) Ø DTU Danchip laboratory, Copenhagen (Denmark) Ø Micronova cleanroom, Aalto University and VTT, Helsinki (Finland)
4 Myfab The Swedish research infrastructure for micro- and nanotechnology Myfab the Swedish research infrastructure for micro- and nanofabrication. Director: Thomas Swahn Distributed infrastructure Clean-room facilities and expertise support Sweden Finland Best equipment in Sweden Advanced research and education Researchers and product developers Universities and high tech industries Common booking system Norway Denmark Ångström Microstructure Lab University of Uppsala Uppsala GothenburgStockholm Electrum Laboratory KTH / Acreo MC2 Nanofabrication Lab Chalmers University of Technology Lund Lund Nano Lab (-from 2016) Lund University
5 Myfab Laboratories Nanofabrication Lab Chalmers MC2 Gothenburg Electrum Laboratory KTH Royal Inst. of Tech. Stockholm Microstructure Lab Ångström Laboratory Uppsala University Lund Nano Lab Lund Univ. Lund University Outstanding Technologies Microwave and Photonic process line Nano and Quantum Technology process line Si-technologies Compound semiconductors Nanomaterial synthesis Life Science Materials science and thin film technology Ion Beam Technology Nano imprint lithography Epitaxy/nanowires, ALD and aerotaxy Characterization
6 Charge-based Open Access Open most days of the year at four locations! No waiting no second selection just book! Myfab LIMS a joint system for booking, logging, resource planning and evaluation Normalized charges (matrix) Active users - receive clean-room course training - are offered driver s licence educations for tools - receive process planning assistance Process service through laboratory staff
7 Lund Nano Lab as part of NanoLund and Myfab LNCL Ångström Microstructure lab NanoLund research NanoLund Lund Nano Lab Myfab MC2 lab Electrum lab Innovation Nanoeducation NorFab Micronova DanChip
8 Lund Nano Lab Ø One of the resource areas of NanoLund, inaugurated in 2007 Ø Part of Division of Solid State Physics, Lund University Ø Research facility for NanoLund members and external users, both academic and commercial Ø Cleanroom facility, over 80 tools with full access for lab users Ø Main area of research/development: III-V nanowires Ø Number of active users: 140, including 6 companies Ø Education: more than 100 students use the lab every year Ø LNL staff: 15 persons (including workshop staff) Ø Part of Myfab Consortium since April 1, 2016
9 Mission of LNL Ø Mission of LNL within Myfab: (1) to provide complementary resources in micro- and nanofabrication and characterization, (2) to facilitate links with relevant industry, Ø Mission of LNL within Lund University: (1) to serve as the main nanofabrication center for Lund University researchers, (2) to act as a showcase for multi-disciplinary research in nanotechnology. Ø Mission of LNL within NanoLund: (1) to supply best possible nanofabrication resources for multi-disciplinary and cross-disciplinary research, (2) to facilitate creation of new competence and know-how.
10 Strategic aims of LNL Ø To provide state-of-the-art resources in nanofabrication for NanoLund researchers. Ø To continue the role of educating students and researchers in the areas of nanofabrication and semiconductor processing techniques. Ø To extend cooperation and interaction within Scandinavia (Myfab, NorFab etc.). To expand cooperation between LNL and MAX IV, ESS and other large laboratories and companies in the region. Ø To establish networks with European and other International cleanroom facilities.
11 Lund Nano Lab: advanced technology for research
12 LNL resources and structure Level 1 Cleanroom class ISO 5 (100) Semiconductor processing 3 individual anti-vibration platforms Level 2 Cleanroom class ISO 7 (10000) Epitaxial growth Includes Berzelius lab (ca ISO 8)
13 Lund Nano Lab resources Equipment and processes at LNL: 1. Growth of III-V nanowires (MOVPE, CBE, aerosol, aerotaxy) 2. Deposition and etching (ALD, magnetron sputtering, thermal and e- beam evaporation, RIE) 3. Patterning (optical lithography, EBL, FIB, nanoimprint, block copolymer lithography) 4. Characterization (SEM, AFM, ellipsometry, profilometer, PL, CL, electrical). TEM available via NanoLund. Complete list of all LNL tools LIMS home page:
14 Companies at LNL (past and present) LEDs Solar cells Electronics Nanoimprint Nano-electromechanics
15 Summary Ø Lund Nano Lab provides open-access to state-of-the-art nanofabrication facilities in Lund and via Myfab to other cleanrooms in Sweden and Scandinavia. Ø The lab resources are open for academic groups, start-ups and industry. Ø LNL personnel offer cleanroom and safety education, equipment hands-on training and process support. Ø LNL 3D tour:
16 Nanoscience & Nanotechnology research at Lund University is creating a new industry sector, at Ideon and beyond.. Köpenhamn Malmö Lunds stad Lunds Universitet - Campus Norr Ideon Science Park LUNDS TEKNISKA HÖGSKOLA
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