Record of Line-item Letter Ballot Review by TC Chapter for Procedural Review

Transcription

1 Record of Line-item Letter Ballot Review by TC Chapter for Procedural Review Region/Locale: NA Global Technical Committee: EHS TC Chapter Cochairs: Bert Planting (ASML), Chris Evanston (Salus), Sean Larsen (LAM Research) Standards Staff: Kevin Nguyen Scheduled in Background Statement Actual Date 7/12/2018 7/12/2018 Location SF Marriott Marquis SF Marriott Marquis for Change of Date and/or Location (if changed) Note: See Regulations 9.5 Exceptions for allowable reason to change. Document Information I. Document Number, Title, Lists of Line Items Document Number Document Title 6171 Line Item Revision to SEMI S2-1016, Environmental, Health, and Safety Guideline For Semiconductor Manufacturing Equipment List of Line Items Line Item 1 Line Item 2 Revision to Section 23 Related to Oxygen Deficiency Risk Assessment Revisions Related to Oxygen Deficiency Assessment Criteria 1

2 Line Item 1 Adjudication II. Tally Standards staff to fill in. Voting Tally: As-cast tally after close of voting period Note: A minimum of 60% of the Voting Interests that have TC Members within the global technical committee that issued the Letter Ballot must return Votes. (Regulations ) Voting Tally (with example values): Voting Interest: Returned Votes Distribution Return Rate Letter Ballot = 63.0% 60% Intercommittee Ballot 28 Voting Interest Reject(s) 1 Total Voters with Rejects 1 Voting Interest Accept(s) 54 Note: See Regulations for definition of Voting Interest. III. Rejects Voting Interest Reject 1 (Voting Interest Name: Seagate) Voter Reject 1 (Voter: Wong, Carl (Seagate)) Negative 1 Negative Referenced Section/ Paragraph Negative Text *TF/TC Chapter to fill in, including text in the ballot if necessary *Original complete Negative text (e.g., issue, justification, suggestion) should be copied. Negative The criteria does not have a criterion to put the alternate limit value used or rationale for using this alternate value into the user manuals; therefore, the user will not know if a specified location will meet their local jurisdiction 19.5% requirements. TF input (optional) Withdrawal Proposed Solution: Add a criterion to put the rationale for the alternate oxygen deficient values used during the assessment, the location where the 19.5 % is exceeded, and a cautionary hazard alert in the manual that local criteria may not have been met because the 19.5% limit has not been met X No Negative withdrawal made by Voter. Withdrawal document received by Standards staff on 07/10/2018. GO TO Related GO TO Final (A) 2

3 Final (check if applicable) (check if applicable) x (A) Withdrawn (counted under h in disposition) (B) Not related (counted under i in disposition) (C) Related and not persuasive (significant) (D) Not significant (counted under j in disposition) (E) Related and persuasive and not addressed by technical change DOCUMENT FAILS (F) Addressed by technical change (counted under k disposition) Comment generated. See Section V-(ii) Comment # X. Disposition of Voting Interest Reject 1 Check only when the Document has not been failed. 1 Original number (#) of Negatives (g) 1 Number of Negatives withdrawn (h) # Number of Negatives found not related (i) # Number of Negatives found not significant (j) # Number of Negatives addressed by technical change (Negative becomes not significant) Final x g - (h + i +j + k) = 0 g - (h + i +j + k) >0 Reject without a Negative (k) Reject is Not Valid and is not included in the denominator of VI. Approval Conditions Check Reject is included in the denominator of VI. Approval Conditions Check Not Valid Note: If all of the Negatives included with a Reject Vote are withdrawn, determined to be not related, or determined to be not significant, the Reject Vote is not valid. (Regulations ) Note: A Negative addressed by a technical change is automatically considered to be not significant. (Regulations ) IV. Other Technical Issues Note: TC Chapter may choose to address a technical issue that is not part of a Negative received on a Letter Ballot (i.e., a Comment or a reason not addressed by a Vote response) by handling it as a Negative and finding it related and technically persuasive. The TC Chapter may then fail the Document or address such technical issue by using the procedure defined in Regulations to make a technical change to the Document. (Regulations ) V. Comments V- (i) Voters Comments Commenter 1 (George Rutherford/Projects etc Pty., Ltd.,) - Comment 1 *TF/TC Chapter to fill in section/paragraph #, if necessary. 3

4 Comment I have been meaning to raise this matter for sometime 'officially' I have mentioned it in mtgs and during various on line discussions but it has not been really considered within SEMI I think. I am on the Standards Committees for both the ISO and IEC (also the IEC TC65A). The IEC is the Machinery Sector Derivative of IEC and therefore should be referenced rather than the IEC which is a Functional Safety Generic. Additionally the CURRENT version of ISO (and 2) are technically flawed documents and if used without great care may lead to a lesser level of safety compared to the IEC I can submit various arguments to support my comment if anyone is interested? Both the and are currently undergoing a revision and it is hoped that the technical flaws in the can be removed although at this stage this cannot be guaranteed due to a certain 'majority' on the WG. Pls feel free to contact me at tech@projectsetc.com for further details. The TC Chapter agreed to do one of the following actions. Action *No motion is required in this step. Already addressed by Commenter #, Comment # X No further action was taken by the TC Chapter. Refer to the TF for more consideration. New Business Editorial Change V-(ii) Comments Created by Handling Negative None VI. Editorial Changes Other than Those Voted on in V Original section/paragraph number and at least one full sentence are required in FROM and TO fields. None VII. Approval Conditions Check VII. - (i). Approval Rate APPROVAL CONDITION 1: All Negatives have been discussed and were withdrawn, found not related, found not persuasive, or addressed by a technical change. (Regulations ) APPROVAL CONDITION 2: At least 90% of the sum of valid Voting Interest Accept and Voting Interest Reject Votes must be Accept. (Regulations ) Note: If both approval conditions are not satisfied, the Document fails. Accepts (Accepts + Valid Rejects) Approval Rate = 54 / 54 = 100.0% 90% 4

5 VII. (ii) Approval Level Note: See Regulations for further information. x Globally Approved (No Ratification Ballot needed): Line Item 1 meets the Letter Ballot approval conditions for the global technical committee. Need a Ratification Ballot: Line Item 1 meets the Letter Ballot approval conditions for the TC Chapter and a Ratification Ballot will be issued to validate technical changes. 5

6 Line Item 2 Adjudication II. Tally Standards staff to fill in. Voting Tally: As-cast tally after close of voting period Note: A minimum of 60% of the Voting Interests that have TC Members within the global technical committee that issued the Letter Ballot must return Votes. (Regulations ) Voting Tally (with example values): Voting Interest: Returned Votes Distribution Return Rate Letter Ballot = 63.0% 60% Intercommittee Ballot 28 Voting Interest Reject(s) 5 Total Voters with Rejects 5 Voting Interest Accept(s) 49 Note: See Regulations for definition of Voting Interest. III. Rejects Voting Interest Reject 1 (Voting Interest Name: TEL) Voter Reject 1 (Voter: Crane, Lauren (TEL)) Negative 1 Negative Referenced Section/ Paragraph Negative Text *TF/TC Chapter to fill in, including text in the ballot if necessary *Original complete Negative text (e.g., issue, justification, suggestion) should be copied. 6

7 Technical Negative I am concerned about the contrast of having terminology defining ODA (oxygen deficient atmosphere) at 19.5% while says this is just a recommendation. From what I recall in TF discussions about different regional values for ODA, they do not differ that much. I think it would be much more clear to have a single assessment value for S2. I think 19.5% is okay. === Delete Note: the spirit of is nonetheless available, if it is really needed, in the S2 assessment instructions (See regarding conforms to the performance goal ). Change the Note to The selected oxygen deficient atmosphere limit defined in section 5.2.XX is based on US OSHA (reference 29 CFR (b)) and is applied without any adjustment in the value for chemical emissions such as identified in sections (e.g., 1% of OEL). TF input (optional) Withdrawal and x No Negative withdrawal made by Voter. Withdrawal document received by Standards staff on MM/DD/YYYY. Related is mutually agreed upon. (Needs no motion.) Negative is not related. (Needs 2/3 votes to pass.) GO TO Related GO TO Final (A) GO TO Persuasive Related [Negative is not related.] < 2/3 2/3 [Negative is not related.] GO TO Persuasive GO TO Final (B) Persuasive and x Negative is related and persuasive. (Needs >1/3 votes to pass.) Negative is related and not persuasive. (Needs 2/3 votes to pass.) John Visty (Salus Engineering)/Lauren Crane (TEL) 9 Y-0 N; failed. 7

8 x [Negative is related and persuasive.] > 1/3 [Negative is related and not persuasive.] < 2/3 2/3 [Negative is related and not persuasive.] < 90% 90% [Negative is related and not persuasive.] Technical Change Recommendations Is a technical change recommended? GO TO Final (C) x Y GO TO Address by Technical Change Option N GO TO Final GO TO Not Significant Finding Option Original section/paragraph number and at least one full sentence are required in FROM and TO fields. FROM: Section/Paragraph XXX Address by Technical Change Option Not Significan Technical Changes 1 2 Incorporation of the Technical Change FROM: Section/Paragraph XXX Negative is addressed by the technical change(s). 2/3 [Negative is addressed by the technical change(s).] [Negative is not addressed by the technical change(s).] < 2/3 To incorporate the technical change(s). GO TO Incorporation of the Technical Change GO TO Final GO TO Final 90% [Agree to incorporate.] (F) GO TO Final [Disagree to incorporate.]>10% This option can be used only if the TC Chapter finds a Negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action. (Regulations ) It is mutually agreed upon to term the Negative not significant. GO TO Final (D) 8

9 Final Use of Not significant finding option Vote (check if applicable) (check if applicable) It is mutually agreed upon to term the Negative significant. Whether or not the Negative is not significant is decided by a vote. The Negative is not significant. x XX Y-XX N; passed with simple majority XX Y-XX N; failed with simple majority (A) (B) (C) (D) (E) (F) Withdrawn (counted under h in disposition) Not related (counted under i in disposition) Related and not persuasive (significant) Not significant (counted under j in disposition) GO TO Final (C) GO TO Final (D) GO TO Final (C) Related and persuasive and not DOCUMENT FAILS addressed by technical change Addressed by technical change (counted under k disposition) Comment generated. See Section V-(ii) Comment # X. Negative 2 Negative Referenced Section/ Paragraph Negative Text TF input (optional) Related Withdrawal and *TF/TC Chapter to fill in, including text in the ballot if necessary *Original complete Negative text (e.g., issue, justification, suggestion) should be copied. The phrase Where there is a likelihood seems too vague. There is always some likelihood (though usually extremely small). And, it would be better to focus on ODAs caused by equipment emissions (rather than, in effect, any cause which is how the wording is currently). === Change to the effect of Where it is reasonably foreseeable that gas or vapor emissions from the equipment during operation will cause an oxygen deficient atmosphere in areas occupied by personnel, oxygen levels should be measured in those locations during worst case representative operating conditions. Measurement locations should be representative of the reasonably foreseeable worst case exposure in personnel breathing zones. GO TO Related No Negative withdrawal made by Voter. Withdrawal document received by Standards staff on GO TO Final MM/DD/YYYY. (A) GO TO Persuasive Related is mutually agreed upon. (Needs no motion.) Negative is not related. (Needs 2/3 votes to pass.) 9

10 [Negative is not related.] < 2/3 2/3 [Negative is not related.] GO TO Persuasive GO TO Final (B) and Negative is related and persuasive. (Needs >1/3 votes to pass.) Negative is related and not persuasive. (Needs 2/3 votes to pass.) Persuasive Address by Technical Change Option [Negative is related and persuasive.] > 1/3 [Negative is related and not persuasive.] < 2/3 2/3 [Negative is related and not persuasive.] < 90% 90% [Negative is related and not persuasive.] Technical Change Recommendations Is a technical change recommended? GO TO Final (C) Y GO TO Address by Technical Change Option N GO TO Final GO TO Not Significant Finding Option Original section/paragraph number and at least one full sentence are required in FROM and TO fields. Technical Changes 1 2 FROM: Section/Paragraph XXX FROM: Section/Paragraph XXX Negative is addressed by the technical change(s). 10

11 Incorporation of the Technical Change 2/3 [Negative is addressed by the technical change(s).] [Negative is not addressed by the technical change(s).] < 2/3 To incorporate the technical change(s). GO TO Incorporation of the Technical Change GO TO Final GO TO Final 90% [Agree to incorporate.] (F) GO TO Final [Disagree to incorporate.]>10% This option can be used only if the TC Chapter finds a Negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action. (Regulations ) Not Significant Finding Option Final Use of Not significant finding option Vote (check if applicable) (check if applicable) It is mutually agreed upon to term the Negative not significant. It is mutually agreed upon to term the Negative significant. Whether or not the Negative is not significant is decided by a vote. The Negative is not significant. XX Y-XX N; passed with simple majority XX Y-XX N; failed with simple majority (A) (B) (C) (D) (E) (F) Withdrawn (counted under h in disposition) Not related (counted under i in disposition) Related and not persuasive (significant) Not significant (counted under j in disposition) GO TO Final (D) GO TO Final (C) GO TO Final (D) GO TO Final (C) Related and persuasive and not DOCUMENT FAILS addressed by technical change Addressed by technical change (counted under k disposition) Comment generated. See Section V-(ii) Comment # X. Disposition of Voting Interest Reject 1 Check only when the Document has not been failed. # Original number (#) of Negatives (g) # Number of Negatives withdrawn (h) 11

12 # Number of Negatives found not related (i) # Number of Negatives found not significant (j) # Number of Negatives addressed by technical change (Negative becomes not significant) Final g - (h + i +j + k) = 0 g - (h + i +j + k) >0 Reject without a Negative (k) Reject is Not Valid and is not included in the denominator of VI. Approval Conditions Check Reject is included in the denominator of VI. Approval Conditions Check Not Valid Note: If all of the Negatives included with a Reject Vote are withdrawn, determined to be not related, or determined to be not significant, the Reject Vote is not valid. (Regulations ) Note: A Negative addressed by a technical change is automatically considered to be not significant. (Regulations ) Voting Interest Reject 2 (Voting Interest Name: AMAT) Voter Reject 1 (Voter: Ed Karl (AMAT)) Negative 1 Negative Referenced Section/ Paragraph Negative Text *TF/TC Chapter to fill in, including text in the ballot if necessary. *Original complete Negative text (e.g., issue, justification, suggestion) should be copied. Section Negative Currently, the proposed requirement only applies to operating conditions. Applied Materials believes that measurements should be made during worst case representative operating and maintenance conditions. Proposed Solution: Where there is a likelihood of an oxygen deficient atmosphere, oxygen levels should be measured during worst case representative operating and maintenance conditions. Measurement locations should be representative of the reasonably foreseeable worst case exposure in personnel breathing zones. (Ballot Response 6171 from AMAT.doc) TF input (optional) Related Withdrawal and x No Negative withdrawal made by Voter. Withdrawal document received by Standards staff on MM/DD/YYYY. Related is mutually agreed upon. (Needs no motion.) Negative is not related. (Needs 2/3 votes to pass.) GO TO Related GO TO Final (A) GO TO Persuasive 12

13 [Negative is not related.] < 2/3 2/3 [Negative is not related.] GO TO Persuasive GO TO Final (B) and Negative is related and persuasive. (Needs >1/3 votes to pass.) Negative is related and not persuasive. (Needs 2/3 votes to pass.) Persuasive [Negative is related and persuasive.] > 1/3 [Negative is related and not persuasive.] < 2/3 2/3 [Negative is related and not persuasive.] < 90% 90% [Negative is related and not persuasive.] Technical Change Recommendations Is a technical change recommended? GO TO Final (C) Y GO TO Address by Technical Change Option N GO TO Final GO TO Not Significant Finding Option Original section/paragraph number and at least one full sentence are required in FROM and TO fields. Address by Technical Change Option Technical Changes 1 2 FROM: Section/Paragraph XXX FROM: Section/Paragraph XXX Negative is addressed by the technical change(s). 13

14 Incorporation of the Technical Change 2/3 [Negative is addressed by the technical change(s).] [Negative is not addressed by the technical change(s).] < 2/3 To incorporate the technical change(s). GO TO Incorporation of the Technical Change GO TO Final GO TO Final 90% [Agree to incorporate.] (F) GO TO Final [Disagree to incorporate.]>10% This option can be used only if the TC Chapter finds a Negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action. (Regulations ) Not Significant Finding Option Final Use of Not significant finding option Vote (check if applicable) (check if applicable) It is mutually agreed upon to term the Negative not significant. It is mutually agreed upon to term the Negative significant. Whether or not the Negative is not significant is decided by a vote. The Negative is not significant. XX Y-XX N; passed with simple majority XX Y-XX N; failed with simple majority (A) (B) (C) (D) (E) (F) Withdrawn (counted under h in disposition) Not related (counted under i in disposition) Related and not persuasive (significant) Not significant (counted under j in disposition) GO TO Final (D) GO TO Final (C) GO TO Final (D) GO TO Final (C) Related and persuasive and not DOCUMENT FAILS addressed by technical change Addressed by technical change (counted under k disposition) Comment generated. See Section V-(ii) Comment # X. Disposition of Voting Interest Reject 2 Check only when the Document has not been failed. # Original number (#) of Negatives (g) # Number of Negatives withdrawn (h) # Number of Negatives found not related (i) # Number of Negatives found not significant (j) 14

15 # Number of Negatives addressed by technical change (Negative becomes not significant) Final g - (h + i +j + k) = 0 g - (h + i +j + k) >0 Reject without a Negative (k) Reject is Not Valid and is not included in the denominator of VI. Approval Conditions Check Reject is included in the denominator of VI. Approval Conditions Check Not Valid Note: If all of the Negatives included with a Reject Vote are withdrawn, determined to be not related, or determined to be not significant, the Reject Vote is not valid. (Regulations ) Note: A Negative addressed by a technical change is automatically considered to be not significant. (Regulations ) Voting Interest Reject 3 (Voting Interest Name: LAM) Voter Reject 3 (Voter: Larsen, Sean (LAM)) Negative 1 Negative Referenced Section/ Paragraph Negative Text TF input (optional) Withdrawal and *TF/TC Chapter to fill in, including text in the ballot if necessary. *Original complete Negative text (e.g., issue, justification, suggestion) should be copied. ID Section Description LMRC1 LI This proposed criteria limited to Normal Ops is a wimp out. It provides no guidance on how to consider the sub-fab environment, which is generally the area of most concern for this topic during normal ops, and also very rarely reasonably simulated at equipment manufacturing facilities. It also does not address entering the purged area for maintenance or any leak possibilities that are also likely to be the source of O2 deficient areas of risk. Suggestion / Justification 1) Provide some guidance for how to address the sub-fab areas, and 2) Write the rest of the needed criteria GO TO Related No Negative withdrawal made by Voter. Withdrawal document received by Standards staff on GO TO Final MM/DD/YYYY. (A) GO TO Persuasive Related is mutually agreed upon. (Needs no motion.) Negative is not related. (Needs 2/3 votes to pass.) Related [Negative is not related.] < 2/3 GO TO Persuasive 15

16 2/3 [Negative is not related.] GO TO Final (B) and Negative is related and persuasive. (Needs >1/3 votes to pass.) Negative is related and not persuasive. (Needs 2/3 votes to pass.) Persuasive [Negative is related and persuasive.] > 1/3 [Negative is related and not persuasive.] < 2/3 2/3 [Negative is related and not persuasive.] < 90% 90% [Negative is related and not persuasive.] Technical Change Recommendations Is a technical change recommended? GO TO Final (C) Y GO TO Address by Technical Change Option N GO TO Final GO TO Not Significant Finding Option Original section/paragraph number and at least one full sentence are required in FROM and TO fields. FROM: Section/Paragraph XXX Address by Technical Change Option Technical Changes 1 FROM: Section/Paragraph XXX 2 Negative is addressed by the technical change(s). 2/3 [Negative is addressed by the technical change(s).] [Negative is not addressed by the technical change(s).] < 2/3 GO TO Incorporation of the Technical Change GO TO Final 16

17 Incorporation of the Technical Change To incorporate the technical change(s). GO TO Final 90% [Agree to incorporate.] (F) GO TO Final [Disagree to incorporate.]>10% This option can be used only if the TC Chapter finds a Negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action. (Regulations ) Not Significant Finding Option Final Use of Not significant finding option Vote (check if applicable) (check if applicable) It is mutually agreed upon to term the Negative not significant. It is mutually agreed upon to term the Negative significant. Whether or not the Negative is not significant is decided by a vote. The Negative is not significant. XX Y-XX N; passed with simple majority XX Y-XX N; failed with simple majority (A) (B) (C) (D) (E) (F) Withdrawn (counted under h in disposition) Not related (counted under i in disposition) Related and not persuasive (significant) Not significant (counted under j in disposition) GO TO Final (D) GO TO Final (C) GO TO Final (D) GO TO Final (C) Related and persuasive and not DOCUMENT FAILS addressed by technical change Addressed by technical change (counted under k disposition) Comment generated. See Section V-(ii) Comment # X. Voter Reject 3 (Voter: Larsen, Sean (LAM)) Negative 2 Negative Referenced Section/ Paragraph Negative Text *TF/TC Chapter to fill in, including text in the ballot if necessary. *Original complete Negative text (e.g., issue, justification, suggestion) should be copied. 17

18 TF input (optional) Withdrawal and ID Section Description LMRC2 LI1 5.2.XX COMMENT I am concerned with the concept of including the 19.5% O2 minimum level in the definition of O2 deficient atmosphere. It is a valid level for on-going exposures, but if the O2 level recovers quickly, for example when the area is opened to be entered for maintenance, lower levels of O2 can be easily tolerated for short periods of time. Suggestion / Justification Rewrite the definition to address impairment GO TO Related No Negative withdrawal made by Voter. Withdrawal document received by Standards staff on GO TO Final MM/DD/YYYY. (A) GO TO Persuasive Related is mutually agreed upon. (Needs no motion.) Negative is not related. (Needs 2/3 votes to pass.) Related [Negative is not related.] < 2/3 2/3 [Negative is not related.] GO TO Persuasive GO TO Final (B) and Negative is related and persuasive. (Needs >1/3 votes to pass.) Negative is related and not persuasive. (Needs 2/3 votes to pass.) Persuasive [Negative is related and persuasive.] > 1/3 [Negative is related and not persuasive.] < 2/3 2/3 [Negative is related and not persuasive.] < 90% 90% [Negative is related and not persuasive.] Is a technical change recommended? GO TO Final (C) Y GO TO Address by Technical Change Option N GO TO Final GO TO Not Significant Finding Option 18

19 Technical Change Recommendations Original section/paragraph number and at least one full sentence are required in FROM and TO fields. FROM: Section/Paragraph XXX Address by Technical Change Option Not Significant Finding Option Technical Changes 1 2 Incorporation of the Technical Change FROM: Section/Paragraph XXX Negative is addressed by the technical change(s). 2/3 [Negative is addressed by the technical change(s).] [Negative is not addressed by the technical change(s).] < 2/3 To incorporate the technical change(s). GO TO Incorporation of the Technical Change GO TO Final GO TO Final 90% [Agree to incorporate.] (F) GO TO Final [Disagree to incorporate.]>10% This option can be used only if the TC Chapter finds a Negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action. (Regulations ) Use of Not significant finding option Vote It is mutually agreed upon to term the Negative not significant. It is mutually agreed upon to term the Negative significant. Whether or not the Negative is not significant is decided by a vote. The Negative is not significant. XX Y-XX N; passed with simple majority GO TO Final (D) GO TO Final (C) GO TO Final (D) 19

20 Final (check if applicable) (check if applicable) XX Y-XX N; failed with simple majority (A) (B) (C) (D) (E) (F) Withdrawn (counted under h in disposition) Not related (counted under i in disposition) Related and not persuasive (significant) Not significant (counted under j in disposition) GO TO Final (C) Related and persuasive and not DOCUMENT FAILS addressed by technical change Addressed by technical change (counted under k disposition) Comment generated. See Section V-(ii) Comment # X. Disposition of Voting Interest Reject 3 Check only when the Document has not been failed. # Original number (#) of Negatives (g) # Number of Negatives withdrawn (h) # Number of Negatives found not related (i) # Number of Negatives found not significant (j) # Number of Negatives addressed by technical change (Negative becomes not significant) Final g - (h + i +j + k) = 0 g - (h + i +j + k) >0 Reject without a Negative (k) Reject is Not Valid and is not included in the denominator of VI. Approval Conditions Check Reject is included in the denominator of VI. Approval Conditions Check Not Valid Note: If all of the Negatives included with a Reject Vote are withdrawn, determined to be not related, or determined to be not significant, the Reject Vote is not valid. (Regulations ) Note: A Negative addressed by a technical change is automatically considered to be not significant. (Regulations ) Voting Interest Reject 4 (Voting Interest Name: ASML) Voter Reject 4 (Voter: Bert Planting (ASML)) Negative 1 Negative Referenced Section/ Paragraph Negative Text *TF/TC Chapter to fill in, including text in the ballot if necessary. *Original complete Negative text (e.g., issue, justification, suggestion) should be copied. 20

21 TF input (optional) Withdrawal and Reject1: 5.2.XX based on OSHA limit is used in definition of 5.2.XX. There are many other limits used in different parts of the wolrd. In definition this should be ww based and not US centric Reject 2: : How is finding defiend, is this based for example based on risk (only 5 minutes 15% oxygen is no risk) or standards. This is very unclear for me as a design criteria. GO TO Related No Negative withdrawal made by Voter. Withdrawal document received by Standards staff on GO TO Final MM/DD/YYYY. (A) GO TO Persuasive Related is mutually agreed upon. (Needs no motion.) Negative is not related. (Needs 2/3 votes to pass.) Related [Negative is not related.] < 2/3 2/3 [Negative is not related.] GO TO Persuasive GO TO Final (B) and Negative is related and persuasive. (Needs >1/3 votes to pass.) Negative is related and not persuasive. (Needs 2/3 votes to pass.) Persuasive Address by Technical [Negative is related and persuasive.] > 1/3 [Negative is related and not persuasive.] < 2/3 2/3 [Negative is related and not persuasive.] < 90% 90% [Negative is related and not persuasive.] Technical Change Recommendations Is a technical change recommended? GO TO Final (C) Y GO TO Address by Technical Change Option N GO TO Final GO TO Not Significant Finding Option Original section/paragraph number and at least one full sentence are required in FROM and TO fields. Te ch 1 FROM: Section/Paragraph XXX 21

22 FROM: Section/Paragraph XXX 2 Negative is addressed by the technical change(s). Incorporation of the Technical Change 2/3 [Negative is addressed by the technical change(s).] [Negative is not addressed by the technical change(s).] < 2/3 To incorporate the technical change(s). GO TO Incorporation of the Technical Change GO TO Final GO TO Final 90% [Agree to incorporate.] (F) GO TO Final [Disagree to incorporate.]>10% This option can be used only if the TC Chapter finds a Negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action. (Regulations ) Not Significant Finding Option Final Use of Not significant finding option Vote (check if applicable) It is mutually agreed upon to term the Negative not significant. It is mutually agreed upon to term the Negative significant. Whether or not the Negative is not significant is decided by a vote. The Negative is not significant. XX Y-XX N; passed with simple majority XX Y-XX N; failed with simple majority (A) (B) (C) Withdrawn (counted under h in disposition) Not related (counted under i in disposition) Related and not persuasive (significant) GO TO Final (D) GO TO Final (C) GO TO Final (D) GO TO Final (C) 22

23 (check if applicable) (D) Not significant (counted under j in disposition) Related and persuasive and not (E) DOCUMENT FAILS addressed by technical change (F) Addressed by technical change (counted under k disposition) Comment generated. See Section V-(ii) Comment # X. Disposition of Voting Interest Reject 4 Check only when the Document has not been failed. # Original number (#) of Negatives (g) # Number of Negatives withdrawn (h) # Number of Negatives found not related (i) # Number of Negatives found not significant (j) # Number of Negatives addressed by technical change (Negative becomes not significant) Final g - (h + i +j + k) = 0 g - (h + i +j + k) >0 Reject without a Negative (k) Reject is Not Valid and is not included in the denominator of VI. Approval Conditions Check Reject is included in the denominator of VI. Approval Conditions Check Not Valid Note: If all of the Negatives included with a Reject Vote are withdrawn, determined to be not related, or determined to be not significant, the Reject Vote is not valid. (Regulations ) Note: A Negative addressed by a technical change is automatically considered to be not significant. (Regulations ) Voting Interest Reject 5 (Voting Interest Name: Seagate) Voter Reject 5 (Voter: Layman, Curt (Seagate)) Negative 1 Negative Referenced Section/ Paragraph Negative Text *TF/TC Chapter to fill in, including text in the ballot if necessary. *Original complete Negative text (e.g., issue, justification, suggestion) should be copied. See Comment by Carl Wong, Seagate TF input (optional) Withdrawal No Negative withdrawal made by Voter. Withdrawal document received by Standards staff on MM/DD/YYYY. GO TO Related GO TO Final (A) 23

24 and Related is mutually agreed upon. (Needs no motion.) Negative is not related. (Needs 2/3 votes to pass.) GO TO Persuasive Related [Negative is not related.] < 2/3 2/3 [Negative is not related.] GO TO Persuasive GO TO Final (B) and Negative is related and persuasive. (Needs >1/3 votes to pass.) Negative is related and not persuasive. (Needs 2/3 votes to pass.) Persuasive Address by Technical Change Option [Negative is related and persuasive.] > 1/3 [Negative is related and not persuasive.] < 2/3 2/3 [Negative is related and not persuasive.] < 90% 90% [Negative is related and not persuasive.] Technical Change Recommendations Is a technical change recommended? GO TO Final (C) Y GO TO Address by Technical Change Option N GO TO Final GO TO Not Significant Finding Option Original section/paragraph number and at least one full sentence are required in FROM and TO fields. Technical Changes 1 2 FROM: Section/Paragraph XXX FROM: Section/Paragraph XXX 24

25 Negative is addressed by the technical change(s). Incorporation of the Technical Change 2/3 [Negative is addressed by the technical change(s).] [Negative is not addressed by the technical change(s).] < 2/3 To incorporate the technical change(s). GO TO Incorporation of the Technical Change GO TO Final GO TO Final 90% [Agree to incorporate.] (F) GO TO Final [Disagree to incorporate.]>10% This option can be used only if the TC Chapter finds a Negative not persuasive by a vote equal to or greater than 90% of the persons voting on the action. (Regulations ) Not Significant Finding Option Final Use of Not significant finding option Vote (check if applicable) (check if applicable) It is mutually agreed upon to term the Negative not significant. It is mutually agreed upon to term the Negative significant. Whether or not the Negative is not significant is decided by a vote. The Negative is not significant. XX Y-XX N; passed with simple majority XX Y-XX N; failed with simple majority (A) (B) (C) (D) (E) (F) Withdrawn (counted under h in disposition) Not related (counted under i in disposition) Related and not persuasive (significant) Not significant (counted under j in disposition) GO TO Final (D) GO TO Final (C) GO TO Final (D) GO TO Final (C) Related and persuasive and not DOCUMENT FAILS addressed by technical change Addressed by technical change (counted under k disposition) Comment generated. See Section V-(ii) Comment # X. Disposition of Voting Interest Reject 5 Check only when the Document has not been failed. 25

26 # Original number (#) of Negatives (g) # Number of Negatives withdrawn (h) # Number of Negatives found not related (i) # Number of Negatives found not significant (j) # Number of Negatives addressed by technical change (Negative becomes not significant) Final g - (h + i +j + k) = 0 g - (h + i +j + k) >0 Reject without a Negative (k) Reject is Not Valid and is not included in the denominator of VI. Approval Conditions Check Reject is included in the denominator of VI. Approval Conditions Check Not Valid Note: If all of the Negatives included with a Reject Vote are withdrawn, determined to be not related, or determined to be not significant, the Reject Vote is not valid. (Regulations ) Note: A Negative addressed by a technical change is automatically considered to be not significant. (Regulations ) IV. Other Technical Issues Note: TC Chapter may choose to address a technical issue that is not part of a Negative received on a Letter Ballot (i.e., a Comment or a reason not addressed by a Vote response) by handling it as a Negative and finding it related and technically persuasive. The TC Chapter may then fail the Document or address such technical issue by using the procedure defined in Regulations to make a technical change to the Document. (Regulations ) *TF/TC Chapter to choose Origin Comment # (Voter: Name and company) / A reason not addressed by a Vote response Technical Issue Referenced Section/ Paragraph *TF/TC Chapter to fill in including text in the ballot as appropriate. *Original Comment text, if applicable, and problem statement, including justification and suggestion, should be copied. Handle technical issue identified above as a Negative. Related and 2nd by GO TO Persuasive Related is mutually agreed upon. (Needs no motion.) Negative is not related and assigned to TF. (Needs 2/3 votes to pass.) Negative is not related and placed on agenda of current TC Chapter meeting as new business. (Needs 2/3 votes to pass.) 26

27 [Negative is not related.] <2/3 2/3 [Negative is not related] and assigned to TF. 2/3 [Negative is not related] and placed on agenda of current TC Chapter meeting as new business. GO TO Persuasive GO TO Final (B) Negative is related and persuasive. (Needs >1/3 votes to pass.) and Negative is related and not persuasive. (Needs 2/3 votes to pass.) Persuasive [Negative is related and persuasive.] > 1/3 [Negative is related and not persuasive.] < 2/3 2/3 [Negative is related and not persuasive.] < 90% Technical Change Recommendations Is a technical change recommended? GO TO Final (C) Y N GO TO Address by Technical Change Option GO TO Final Original section/paragraph number and at least one full sentence are required in FROM and TO fields. FROM: Section/Paragraph XXX Address by Technical Change Option Technical Changes 1 FROM: Section/Paragraph XXX 2 Negative is addressed by the technical change(s). 2/3 [Negative is addressed by the technical change(s).] [Negative is not addressed by the technical change(s).] < 2/3 GO TO Incorporation of the Technical Change GO TO Final 27

28 Final Incorporation of the Technical Change (check if applicable) To incorporate the technical change(s). 90% [Agree to incorporate.] [Disagree to incorporate.] >10% (B) (C) (E) (F) Not related Related and not persuasive Related and persuasive and not addressed by technical change Addressed by technical change Comment generated. See Section V-(ii) Comment # X. V. Comments V- (i) Voters Comments Commenter 1 (George Rutherford) - Comment 1 GO TO Final (F) GO TO Final DOCUMENT FAILS *TF/TC Chapter to fill in section/paragraph #, if necessary. Comment Action I have been meaning to raise this matter for sometime 'officially' I have mentioned it in mtgs and during various on line discussions but it has not been really considered within SEMI I think. I am on the Standards Committees for both the ISO and IEC (also the IEC TC65A). The IEC is the Machinery Sector Derivative of IEC and therefore should be referenced rather than the IEC which is a Functional Safety Generic. Additionally the CURRENT version of ISO (and 2) are technically flawed documents and if used without great care may lead to a lesser level of safety compared to the IEC I can submit various arguments to support my comment if anyone is interested? Both the and are currently undergoing a revision and it is hoped that the technical flaws in the can be removed although at this stage this cannot be guaranteed due to a certain 'majority' on the WG. Pls feel free to contact me at tech@projectsetc.com for further details. The TC Chapter agreed to do one of the following actions. *No motion is required in this step. Already addressed by Commenter #, Comment # No further action was taken by the TC Chapter. Refer to the TF for more consideration. New Business Editorial Change Options for editorial change (check one) Case 1: No vote in this section: To be included and voted on as a group in VI. Editorial Changes Other than Those Voted on in V. Case 2: Voted in this section: Original section number and at least one full sentence are required in FROM and TO fields. 28

29 FROM: Section/Paragraph xxx Editorial Changes 1 2 FROM: Section/Paragraph xxx Vote To approve above editorial change(s) This table is needed for each Comment accompanied a Vote VII. Approval Conditions Check VII. - (i). Approval Rate APPROVAL CONDITION 1: All Negatives have been discussed and were withdrawn, found not related, found not persuasive, or addressed by a technical change. (Regulations ) APPROVAL CONDITION 2: At least 90% of the sum of valid Voting Interest Accept and Voting Interest Reject Votes must be Accept. (Regulations ) Note: If both approval conditions are not satisfied, the Document fails. Accepts (Accepts + Valid Rejects) Approval Rate = / = #DIV/0! 90% VII. (ii) Approval Level Note: See Regulations for further information. Globally Approved (No Ratification Ballot needed): Line Item 2 meets the Letter Ballot approval conditions for the global technical committee. 29

30 Need a Ratification Ballot: Line Item 2 meets the Letter Ballot approval conditions for the TC Chapter and a Ratification Ballot will be issued to validate technical changes. 30

31 Checks for Entire Document Including All Approved Line Items VIII. Safety Check Note: This Safety check applies to the entire Standard or Safety Guideline including all the approved Line Items. See 15 of the Regulations for further information. x This is not a Safety Document, when all safety-related information is removed, the Document is still technically sound and complete. (Regulations 8.7.1) This is a Safety Document, when all safety-related information is removed, the Document is not technically sound and complete. (Regulations 8.7.2) x Vote Safety Checklist (Regulations 15.3) is complete and has been included with the Document throughout the balloting process. (Regulations ) JV/BP 8 Y-0 N; passed IX. Intellectual Property (IP) Check Note: This Letter Ballot may cover all or part of a Standard or Safety Guideline. Regardless of the coverage, this IP check applies to the entire Standard or Safety Guideline including all the approved Line Items*. See Regulations 16 for further information. x The TC Chapter meeting chair asked those participating, if they were aware of any patented technology that might be relevant (see Regulations ) to the Standard or Safety Guideline; or, any copyrighted items or trademarks that are used/reproduced (see Regulations ) in the Standard or Safety Guideline. (Also see, Regulations 8.8) x The question is NOT answered in affirmative (No potentially material patented technology or use/reproduction of copyrighted items/trademarks is known.) The question is answered in affirmative GO TO SECTION X. Is any of the known IPs a patented technology? Yes, at least one of them is a patented technology No GO TO IX (a) Patented Technology GO TO IX (b) Copyright items IX(a) Patented Technologies IX(a1) Total numbers of Patented Technologies to be dealt with # Fill number (l) Known Patented Technology that might be relevant to # Fill number (m) Number of patented technologies first became known to the TC Chapter on or after the day of the issuance of this Letter Ballot Postpone assessment of such patented technologies to be performed at the next scheduled TC Chapter meeting. 31

32 the Standard/Safety Guideline # Fill number (n) Number of patented technologies first became known to the TC Chapter before the day of the issuance of this Letter Ballot GO TO IX (a2) IX(a2) Assessment of disclosed patented technologies Disclosed patented technology #1 (Brief description, e.g., patent title and number): Is disclosed patented technology #1 found to be might be material to the Standard/Safety Guideline? YES (It is a PMPT) Is the use of this PMPT technically justified? This table is needed for each disclosed patented technology. Date of Assessment (If different from the date of Letter Ballot adjudication) MM/DD/YYYY YES NO PROCEED to assess NEXT one, or if this is the last one, GO TO IX(a3) The Document is failed and returned to the TF NO No further action is needed for patented technology #1 IX(a3) LOA status check of PMPT of which inclusion assessed to be justified LOA Status of PMPT #1 Has an LOA for this patented technology been received from every owner? YES NO PROCEED to check NEXT one, or if this is the last one, GO TO IX(b) MOTION Ask ISC for special permission to publish. Quit activity. Wait for LOA Vote The Document is failed and returned to the TF PROCEED to check NEXT one, or if this is the last one, GO TO IX(b1) This table is needed for each PMPT of which inclusion assessed to be justified. XX Y-XX N; passed (or failed) IX(b1) Total numbers of copyrighted items to be dealt with # Fill number (o) Known copyrighted items that are used or reproduced to the Standard/Safety Guideline o > 0 There is at least one known copy righted items that might be relevant to the Standard/Safety Guideline o = 0 There is no disclosed copyrighted item GO TO IX (b2) GO TO IX (c) 32

33 IX(b2) Assessment of disclosed copyrighted items Disclosed copyrighted item #1 (Brief description of its use in the Document): Is disclosed copyrighted item #1 used or reproduced in the Standard/Safety Guideline? YES Is the use/reproduction of this copyrighted item technically justified? YES NO PROCEED to assess NEXT one, or if this is the last one, GO TO IX(b3) The Document is failed and returned to the TF This table is needed for each disclosed copyrighted item. NO No further action is needed for copyrighted item #1 IX(b3) Copyright release status check of copyrighted item of which inclusion assessed to be justified Copyright release Status of copyrighted item #1 Has the copyright release been received from its owner?. YES NO PROCEED to assess NEXT one, or if this is the last one, GO TO IX(c) MOTION Ask ISC for special permission to publish. Quit activity. Wait for copyright release letter The Document is failed and returned to the TF PROCEED to check NEXT one, or if this is the last one, GO TO IX(c) Vote XX Y-XX N; passed (or failed) This table is needed for each copyrighted item of which use/reproduction assessed to be justified. IX(c) Assessment of disclosed (identified) trademark Is there any trademark in the Standard/Safety Guideline? YES NO Is every instance of trademark use technically justified? GO TO IX(d) YES NO GO TO IX(d) The Document is failed and returned to the TF IX(d) IP check completion condition check The co-chair checks if any Patented Technologies first become known to the TC Chapter on or after the day of the issuance of this Letter Ballot? i.e., m>0 in IX(a1) YES NO Sections IX(a2) and IX(a3) shall be completed and recorded for such patented technologies at next scheduled meeting of the TC Chapter. Until then, the TC Chapter shall NOT go to X (making motion to pass/fail this Document) (see Regulations ) Until then this Letter Ballot Review is on hold. GO TO X 33

34 X. Action for This Document (Check all applicable items) x x 2nd by Vote Final Action Line item(s) [1] passed TC Chapter review as balloted and will be forwarded to the ISC A&R SC for procedural review. Line item(s) [X], [X] and [X] passed TC Chapter review with editorial changes and will be forwarded to the ISC A&R SC for procedural review. Line item(s) [X], [X] and [X] passed TC Chapter review with technical changes and with or without editorial changes and will be forwarded to the ISC A&R SC for procedural review. A Ratification Ballot will be issued to verify the technical changes. Line item(s) [2] failed TC Chapter review and will be returned to the TF for rework. Line item(s) [X], [X] and [X] failed TC Chapter review and work will be discontinued. Bert Planting (ASML)/John Visty (Salus Engineering) 11 Y- 0 N x passed failed Note: If the use of PMPT or copyrighted item is justified by the TC Chapter, LOA or release form must be received before publication can proceed. 34