CHARTER: Semiconductor Components, Instruments and Subsystems (SCIS) Working Group

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CHARTER: Semiconductor Components, Instruments and Subsystems (SCIS) Working Group Last Update: 2013.10.14 A. Name Semiconductor Components, Instruments and Sub-systems (SCIS) Working Group B. Members The Semiconductor Components, Instruments and Sub-systems (CIS) Working Group represents SEMI members who produce, package and/or distribute: components such as seals, filters, mass flow controllers, valves, sensors, ion beam sources, etc. instruments for in-line and off-line data measurement, collection, and monitoring sub-systems that support process tools e.g. vacuum, robotics, power conversion, abatement, chillers, etc used in semiconductor or related industries.. C. Structure of the Group 1. The Components, Instruments and Sub-systems (CIS) Working Group, as part of SEMI, should be open to all SEMI members involved in the activities described in B. above. 2. The SEMI staff officer should act as group coordinator. 3. The Group Officers are elected in accordance with the bylaws. 4. Components, Instruments and Sub-systems (CIS) Working Group should act as an independent group within the SEMI structure 5. The Group reports to the SEMI Board of Directors through the SEMI Staff officer. 6. Meetings of the group can be scheduled as required and may be attached to important Semicon shows. SCIS Charter & Bylaws v2013.10.14 Page 1

D. Purpose of the Group To facilitate collective efforts on issues related to the components, instruments and sub-systems that the members feel are more effectively or efficiently undertaken as an association than as individual companies, among which are: 1. To acquire market information and statistics about member activities as defined in B above. 2. To achieve better representation in regard to legislation and lobbying efforts concerning the semiconductor industry. 3. To promote customer awareness of the technical, regulatory, and business issues facing the components, instruments and sub-systems suppliers in meeting the semiconductor industry expectations in product quality and value. 4. To promote cooperative efforts between the Components, Instruments and Subsystems (CIS) Working Group members and other SEMI member companies to solve common problems and eliminate duplication of resources. 5. To promote awareness in the SEMI organization of the expectations of the Components, Instruments and Sub-systems (CIS) Working Group members. 6. To promote participation in the standards group and to promote user awareness about SEMI standards. 7. To be involved in planning and/or sponsoring activities for SEMI exhibits, seminars and other events connected with the industry. 8. To receive SEMI support for meetings with industry leaders to discuss future trends and needs. 9. To create open forums to discuss issues such as safety and environmental, supply chain dynamics, product quality, intellectual property, roadmaps, etc. SCIS Charter & Bylaws v2013.10.14 Page 2

E. Functional Structure 1. Membership 2. Industry Awareness 3. Legislation and Public Affairs 4. Cooperative projects 5. SEMI Awareness 6. Others, as may be established by the Executive Committee The subcommittee will be chaired by a Components, Instruments and Sub-systems (CIS) Working Group member and staffed by Group member company employees. A SEMI staff member will be an Ex-officio member of each subcommittee. An Executive Committee constituted in accordance with the bylaws manages the Group. Subcommittees may be formed to direct activities in areas of mutual member interest such as: Standards (interface, materials, 450mm, etc.) Co-design / Collaboration (innovation, cost-down, standardization) IP protocol and management (subsystem to OEM vs device manufacturer) Education/awareness (SCIS/supply chain issues) COO / Cost reductions (450mm EUV, advanced technology scaling) Defectivity (from component to process) Roadmap collaboration and standardization SCIS Charter & Bylaws v2013.10.14 Page 3

BY-LAWS: Components, Instruments and Sub-systems (CIS) Working Group ARTICLE I: Governing Regulations These by-laws are subject to the Regulations Governing SEMI Committees, hereinafter referred to as the Regulations, and are in accordance with the by-laws of SEMI. The Components, Instruments and Sub-systems (CIS) Working Group will hereinafter be referred to as the Group. All meetings of the Group shall conform to the Antitrust Guidelines attached hereto and made part of these by-laws. SEMI shall support and advise the Group but shall not be responsible for costs incurred by the Group without prior approval by SEMI. ARTICLE II: Scope The scope of the Group shall include products and issues relating to and directly concerning Components, Instruments and Sub-systems. The Group defines Semiconductor Components, Instruments and Sub-systems as the production, packaging and/or distribution of components such as seals, mass flow controllers, valves, etc.; instruments for in-line and off-line data collection and monitoring and subsystems that support process tools e.g. vacuum, abatement, chillers used in semiconductor or related industries... ARTICLE III: Voting Members Group membership shall be open to all SEMI members with interest in Components, Instruments and Sub-systems manufacturing as stated in Article II. Each dues paying SEMI member, having representation in the Group shall be entitled to one vote: one dues-paying SEMI member one vote. SEMI member companies meeting the qualifications in the Article II, and desiring membership in the Group shall indicate in writing that they are Group members and shall designate an employee of the company to be the delegate to the Group. Any Group member who ceases to be an employee of a SEMI member company shall cease to be a member of the Group. SCIS Charter & Bylaws v2013.10.14 Page 4

ARTICLE IV: Non-Voting Members The Chairperson may appoint persons, who may or may not be members as defined in Article III, to the Group as necessary who will act as the liaison member between the Group and other SEMI committees. The Chairperson may appoint advisory representatives. These representatives shall act in an advisory capacity as needed by the Group. The advisory representatives shall be non-voting members of the Group A designated SEMI staff member shall be an Ex-officio member of the Group. ARTICLE V: Executive Committee The Group membership shall authorize the formation of an Executive Committee, consisting of a Chairperson, Vice-Chairperson and at least one other member of the Group, whose term of office shall be for two years. The Chairperson, Vice-Chairperson, and initial Executive Committee members (officers) shall be elected by the Group. Subsequent Executive Committee members (officers) shall be appointed by the Executive Committee, and may be reappointed to additional terms by the Committee. An officer may be removed from office by a two-thirds majority vote of the Group with prior approval of the SEMI executive staff. The Executive Committee shall act as the steering committee for the Group. ARTICLE VI: Term The Group Chairperson and Vice-Chairperson should be elected for a period of two years. Under normal circumstances, the Vice-Chairperson will succeed the Chairperson in order to insure continuity of group activities. The terms of a Group member shall not be limited except, as stated in Article III. Liaison members and advisors shall be for a two (2) year period. Liaison members and advisors may be re-appointed by the Chairperson. ARTICLE VII: Meetings The Group shall meet at least two (2) times in a calendar year, typically during SEMICON shows. Notification of each meeting shall be mailed to Group members not less than forty-five (45) days prior to a meeting. Meetings shall be conducted in the presence of a SEMI staff member. SCIS Charter & Bylaws v2013.10.14 Page 5

ARTICLE VIII: Quorum A quorum shall consist of six (6) members of the Group. Members for this purpose are not individual attendees but member companies as defined in paragraph B. of the Charter. Each voting member of said Group or his authorized representative shall be entitled to one (1) vote. Adoption of by-laws shall be approved in writing by a two-thirds (2/3) majority of the entire Group. Other business of the Group shall be decided by a simple majority of those present. In the event a quorum is not present, the vote of an absent member may be rendered by telephone provided said member shall subsequently confirm his vote in writing. Any action permitted or required to be taken by the Group may be taken without a meeting with prior approval by SEMI Executive Staff, provided, however, that all members shall be duly notified and have an opportunity to vote. A telephone vote may be taken but must be followed by written confirmation by the Group member(s). Such confirmation(s) shall be filed with the minutes of the Group. ARTICLE IX: Chairperson and Vice Chairperson or Co-Chairpersons The Chairperson and Vice Chairperson or Co-Chairpersons of the Group shall be elected by the Group. The Chairperson(s) of the Group may establish or direct Group members to establish subcommittees and appoint chairpersons, thereof. The Chairperson(s) of the Group shall report to the SEMI Executive Staff member or the appointed SEMI Board member on the activities of the Group. ARTICLE X: Amendments Amendments of these by-laws may be made by a two-thirds (2/3) majority vote of the members of the Group with prior approval by SEMI Executive Staff SCIS Charter & Bylaws v2013.10.14 Page 6